VLSI Metallization: Physics and Technologies (Paperback)

VLSI Metallization: Physics and Technologies (Paperback)


Krishna Shenai (Editor)


* Paperback: 529 pages
* Publisher: Artech House Publishers (December 1991)
* Language: English
* ISBN-10: 0890065012




This collection of articles presents developments in VSLI contact and connected technologies and applications. Subjects covered include opto-electronic interconnects and testing, multichip packaging and metallization reliability and multilevel metallization technologies.

Device and circuit interconnects - a perspective; physics and modelling of metal-semiconductor heterojunctions; metal/silicide-silicon contacts; multilevel metallization technologies; metallization of compound semiconductors; optoelectronic interconnects and testing; multichip packaging and metallization and reliability.

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